Product Overview
The four-probe square resistance test system is a high-precision test device with advantages such as good reliability and simple operation. It is of great significance for the design, production, and quality control of microelectronic devices.
Basic Information
| Product number | SR8/SR12 | working environment | room/high temperature, shielded |
| electricity demand | / | Control method | Full-automatic |
| Product Size | Customizable | equipment weight | Customizable |
Application direction
Semiconductor materials, solar cell materials (silicon, polysilicon, silicon carbide, etc.), new materials, functional materials (carbon nanotubes, DLC, graphene, silver nanowires, etc.), conductive films (metal, ITO, etc.), silicon-related films (LTPS, etc.), diffusion layer testing, and others (*For more details, please contact us).
Technical characteristics
SR Series Fully Automatic Four-Probe Square Resistance Test System
● SR8 is compatible with 6/8-inch wafers, and SR12 is compatible with 8/12-inch wafers.
● Designed according to the fully automatic test performance of the production line, ensuring high testing efficiency.
● Single/double probe configuration, suitable for different application scenarios.
● Optional SECS/GEM factory communication protocol.
● Compliant with ASTM and JIS industry standards.
