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    Product Overview Functional structure Specifications Download
    Mask LCVD Repair LD14

    Product Overview

    The mask LCVD repair equipment mainly uses laser-induced chemical vapor deposition (LCVD) technology to repair defects on the masks. The SEMISHARE LD14 series offers a wide range of deposition thickness and high repair precision. The sub-micron level laser precision can effectively deal with masks with extremely small pitches. With sub-micron laser accuracy, it effectively addresses defects on masks with extremely small pitches, providing high-precision, low-cost repair solutions for high-value mask defects, thus significantly reducing production and operational costs for enterprises.

    Basic Information

    Product number LD14 working environment Enclosed
    electricity demand AC 220V ±5% 50Hz Control method Full-automatic
    Product Size Customizable equipment weight Customizable

    Application direction

    It can be used to fill in missing parts on a mask or repair patterns. This technique is often employed to fix issues like open circuits and short circuits.

    Technical characteristics

    Mask LCVD Repair LD14

    ●For products with different thicknesses and large spans, there is no need for manual adjustments when changing products; the equipment can automatically adapt to the height adjustment of the deposition head.
    ●Exhaust gas recovery treatment utilizes high-temperature filters with up to dozens of layers, effectively capturing harmful components in the decomposed exhaust gas, which is then cooled and directed into the factory’s exhaust system.
    ●Customized products can be provided according to customer needs.


    Title

    Project

    Description

    Processing time (1 defect/piece, including positioning time)

    15 s

    Panel size range

    5”-14”

    Panel thickness

    0.1-5mm

    Motion resolution

    ±0.1μm

    Repeat positioning accuracy

    ±1μm

    Slit accuracy

    ≤±1μm

    Autofocus objective lens switching center offset

    ≤±1μm

    Deposition parameters

    Deposition mode:Scan and Step

    Deposition shape: rectangular and circular, length, width, side length or diameter
    The actual size of the spot can be adjusted and displayed by software

    Step deposition rectangle size range:
    3μm*3μm~30μm*30μm, adjustment accuracy 1μm

    Deposition edge accuracy

    ±0.5μm

    Deposition thickness

    2000 Å ~15000Å adjustable

    Maximum total power

    3.5KW


    AC 220V ±5% 50Hz

    UPS

    1000VA/500W  3-20 minutes (half load)

    Consumables

    Compressed air CDA (0.6Mpa, 0~1L/min)

    High purity argon Ar (0.6Mpa, 0~5L/min)

    High purity Cr(CO)6 (purity higher than 99.8%) High purity W(CO)6 (purity higher than 99.8%) or Mo(CO)6 (purity higher than 99.8%)

    Size

    1230*1390*2410

    Computer configuration

    i5-6500CPU, 8GDDR4 memory, 128G solid state drive + 1T mechanical hard disk, 300W industrial-grade power supply, beta version win1064-bit system, PCIeX16, PCIeX4, PCI slot X5, motherboard Gigabit network port X2, serial port X6


    Customer Service
    Request for quotation Request for quotation
    Contact number

    Contact number

    0755-2690 6952 turn 801/804/806/814

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