Product Overview
The mask LCVD repair equipment mainly uses laser-induced chemical vapor deposition (LCVD) technology to repair defects on the masks. The SEMISHARE LD14 series offers a wide range of deposition thickness and high repair precision. The micron-level laser precision can effectively deal with masks with extremely small pitches. With micron-level laser accuracy, it effectively addresses defects on masks with extremely small pitches, providing high-precision, low-cost repair solutions for high-value mask defects, thus significantly reducing production and operational costs for enterprises.
Basic Information
| Product number | LD14 | working environment | Enclosed |
| electricity demand | AC 220V ±5% 50Hz | Control method | Full-automatic |
| Product Size | Customizable | equipment weight | Customizable |
Application direction
It can be used to fill in missing parts on a mask or repair patterns. This technique is often employed to fix issues like open circuits and short circuits.
Technical characteristics
Mask LCVD Repair LD14
●For products with different thicknesses and large spans, there is no need for manual adjustments when changing products; the equipment can automatically adapt to the height adjustment of the deposition head.
●The vapor deposition management control system can quantitatively evaporate materials, ensuring that long-term use does not result in prolonged deposition times due to decreased evaporation rates from material consumption, thus meeting customer demands for process stability.
●Exhaust gas recovery treatment utilizes high-temperature filters with up to dozens of layers, effectively capturing harmful components in the decomposed exhaust gas, which is then cooled and directed into the factory’s exhaust system.
●Customized products can be provided according to customer needs.
