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Model TEG series
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Specification
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Model
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TEG prober-G6
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TEG prober-G8.5
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Dimension
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L: 2500mm * W: 2850mm * H: 2500mm
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L: 3500mm * W: 4000mm * H: 2500mm
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Weight about
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9700KG
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14200KG
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Electricity Demand
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380V, 50Hz, 3Phase, approx. 50A Max
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Panel size
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L * W ≤1500 * 1850mm, Thickness ≤ 3mm
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L * W ≤ 2500 * 2200mm, Thickness ≤ 3mm
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Platform function
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Gantry structure
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Bridge disgn,can choose double gantry
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X-Y-Z travel range
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1850 * 1500 * 58mm
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2500 * 2200 * 58mm
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X-Y velocity
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0~600mm/s adjustable
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Prober
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Probe card
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Two sets, can test two sets of
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X-Y resolution
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0.1μm
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TEG at the same time
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X-Y Repeatability
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±1μm
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Pitch and layout: Customizing
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X-Y axis drive
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Linear motion + Grating ruler
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Probe material: Tungsten or
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Z velocity
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0~10mm/s adjustable
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Beryllium copper
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Z resolution
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0.25μm
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Probe and TEG alignment
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Coordinate positioning
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Z Repeatability
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±1μm
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Pattern matching
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Z axis drive
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Servo motor + Grating ruler
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Probe and TEG Contact mode
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Automatic contact Mechanical
limit edge sensor
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Z axis protection
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Motor self-locking + Mechanical
limit protection
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and software protection
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Platform flatness
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+-50μm
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The limit height can be set according
to the thickness of the panel,
and the OD
value can be set.
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Platform coating
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Antistatic coating
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Probe rotation stroke
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+-90°
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Platform high/low
temperature
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Temp Chuck or Thermal
Stream ( -55~200℃ )
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Probe rotation accuracy
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0.01°
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Microscope
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Optical circuit
system ratio
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5X, 10X, 20X, 50X Objects
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Rotation repeatability
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0.03°
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Magnification range
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50X ~ 500X
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Probe cleaning
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Automatic cleaning
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Focus
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Auto focus
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Electrical test after cleaning
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CCD pixel
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200W / 500W
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Prober current leakage
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Within 100fA (Test standard:
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Light source
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TOP/Bottom coaxial LED light
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-5v ~ +5v, without blowing
N2 and floating).
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Light adjustable independently
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Tester
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Test system
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Two sets Semiconductor
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Laser
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Laser system
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Laser cutting system（2.2mj /
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parameter testing system,2
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Pluse Maximum@50Hz )
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* HRSMU + 4 *MPSMU+CV test
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0-100%
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+Hing precision matrix switch etc.
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Laser wave length
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1064nm, 532nm, 355nm
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TFT test project
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Ion
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Spot scale
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1.0um @ 100X object
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Ioff
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2.0um @ 50X object
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Vth
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Work pattern
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One Shot / Burst / Continue
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Mobility
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Shape
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Adjustable rectangle
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Swing
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Control
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mode
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Automatic test, automatic data load
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TFT test project
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Rs
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and communication
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Rc
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Semi-automatic/full-automatic test
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Maximum test voltage
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+-200V
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Sample Exchange
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Robot
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Maximum test current
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+-1A
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CIM system
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Yes
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Current test resolution
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1fA ( No preamplifier )
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Anti-vibration
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Vibration free table installed
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Voltage test resolution
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0.5uV
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Industry PC
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23-inch display & computer: i7processor,
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Cv test frequency range
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1kHz ~ 5MHz
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2 blocks 1TB hard disk(one of which
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Grounding unit accommodation capacity
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4.2A GNDU
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is a backup hard disk), 8G memory,
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Control
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Security
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Frame covered , and the
operator operates outside
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1G Independent video card, DVD-ROM
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EMO
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Communication
interface
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RS232 /EtherCAT/GPIB etc.
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Limit sensor ,Motion platform
and Laser system limit interlock
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Alarm
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Application
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OLED / TFT - LCD Panel TEG test and Circuit analysis
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Characteristic
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Fastest testing speed in the industry
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Ultra high precision
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Stable test results
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Mult-probe card design
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Linear Motor platform with 0.1μm resolution
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Automatic needle cleaning, Automatic AOI location
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Minimal damage
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Automatic test
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Bridge disgn,can choose double gantry
X-Y-Z travel range
1850 * 1500 * 58mm
2500 * 2200 * 58mm
X-Y velocity
0~600mm/s adjustable
Prober
Probe card
Two sets, can test two sets of
X-Y resolution
0.1μm
TEG at the same time
X-Y Repeatability
±1μm
Pitch and layout: Customizing
X-Y axis drive
Linear motion + Grating ruler
Probe material: Tungsten or
Z velocity
0~10mm/s adjustable
Beryllium copper
Z resolution
0.25μm
Probe and TEG alignment
Coordinate positioning
Z Repeatability
±1μm
Pattern matching
Z axis drive
Servo motor + Grating ruler
Probe and TEG Contact mode
Automatic contact Mechanical
limit edge sensor
Z axis protection
Motor self-locking + Mechanical
limit protection
and software protection
Platform flatness
+-50μm
The limit height can be set according
to the thickness of the panel,
and the OD
value can be set.
Platform coating
Antistatic coating
Probe rotation stroke
+-90°
Platform high/low
temperature
Temp Chuck or Thermal
Stream ( -55~200℃ )
Probe rotation accuracy
0.01°
Microscope
Optical circuit
system ratio
5X, 10X, 20X, 50X Objects
Rotation repeatability
0.03°
Magnification range
50X ~ 500X
Probe cleaning
Automatic cleaning
Focus
Auto focus
Electrical test after cleaning
CCD pixel
200W / 500W
Prober current leakage
Within 100fA (Test standard:
Light source
TOP/Bottom coaxial LED light
-5v ~ +5v, without blowing
N2 and floating).
Light adjustable independently
Tester
Test system
Two sets Semiconductor
Laser
Laser system
Laser cutting system（2.2mj /
parameter testing system,2
Pluse Maximum@50Hz )
* HRSMU + 4 *MPSMU+CV test
0-100%
+Hing precision matrix switch etc.
Laser wave length
1064nm, 532nm, 355nm
TFT test project
Ion
Spot scale
1.0um @ 100X object
Ioff
2.0um @ 50X object
Vth
Work pattern
One Shot / Burst / Continue
Mobility
Shape
Adjustable rectangle
Swing
Control
mode
Automatic test, automatic data load
TFT test project
Rs
and communication
Rc
Semi-automatic/full-automatic test
Maximum test voltage
+-200V
Sample Exchange
Robot
Maximum test current
+-1A
CIM system
Yes
Current test resolution
1fA ( No preamplifier )
Anti-vibration
Vibration free table installed
Voltage test resolution
0.5uV
Industry PC
23-inch display & computer: i7processor,
Cv test frequency range
1kHz ~ 5MHz
2 blocks 1TB hard disk(one of which
Grounding unit accommodation capacity
4.2A GNDU
is a backup hard disk), 8G memory,
Control
Security
Frame covered , and the
operator operates outside
1G Independent video card, DVD-ROM
EMO
Communication
interface
RS232 /EtherCAT/GPIB etc.
Limit sensor ,Motion platform
and Laser system limit interlock
Alarm
Application
OLED / TFT - LCD Panel TEG test and Circuit analysis
Characteristic
Fastest testing speed in the industry
Ultra high precision
Stable test results
Mult-probe card design
Linear Motor platform with 0.1μm resolution
Automatic needle cleaning, Automatic AOI location
Minimal damage
Automatic test
