|
Model LCVD series
|
|
Specification
|
|
|
|
Model
|
LCVD-G6
|
LCVD-G8.5
|
|
Dimension
|
W: 2850mm*L: 2500mm*H: 2500mm
|
W: 4000mm*L: 3500mm*H: 2500mm
|
|
Weight (about)
|
7500KG
|
10500KG
|
|
Electricity Demand
|
380V, 50Hz, 3Phase, approx. 40A Max.
|
380V, 50Hz, 3Phase, approx. 60A Max.
|
|
Repair capacity
|
Repairable panel size
|
L * W ≤ 1500mm * 1850mm,
|
L * W ≤ 2500mm * 2200mm, Thickness ≤ 3mm
|
|
Thickness ≤ 3mm
|
Laser
|
Laser system
|
DPSS Laser cutting system
|
|
CVD material
|
W, Cr, MO, Al
|
CW Laser deposition system
|
|
line deposition velocity
|
5~10μm/s ( Thickness 5000Å )
|
Energy regulation
accuracy
|
0-1000 steps
|
|
Single defect repair time
|
After positioning, the time of repairing
|
0-100%
|
|
a single defect is about 5 seconds.
|
Slit size
|
0~2.5mm
|
|
Recipe
|
Software edit and stroed locally
|
Slit accuracy
|
1μm
|
|
Cutting width
|
1μm~50μm adjustable
|
Laser energy calibration
mode
|
Automatic calibration
|
|
CVD width
|
2μm~30μm adjustable
|
Calibration time cost
|
3mins
|
|
CVD edge accuracy
|
+/-0.5μm
|
Laser energy
|
Better than 2%
|
|
CVD thickness
|
2000Å ~15000Å Adjustable
|
calibration accuracy
|
Resistance of
|
<65Ω (width: 5μm, Length :
|
Wavelength
|
Cut Laser: IR 1064nm, GRN 532nm,
|
|
deposition line
|
50μm, Thickness : 5000 Å)
|
UV266nmCVD CW laser: NUV 351nm
|
|
CVD stability
|
Cleaning times by cleaning
|
Pulse width
|
< 12 ns
|
|
machine >10 times
|
Spot size
|
2.0~ @50X object 1064nm
|
|
Strong acid-base test > 1H
|
( test on standard mask)
|
|
Brush wipe > 1H
|
Scanning energy
uniformity
|
Better than 5% @IR
|
|
Ultrasonic 1Mhz > 1H
|
Laser lifetime
|
Cut Laser: 1 billion excitation
|
|
Gantry
|
X-Y-Z travel range
|
LCVD-G6 1500 * 1850 * 58mm,
LCVD-G8.5 2500 * 2200 * 58mm
|
CVD CW laser: 8000 hours
|
|
Repair mode
|
Scan mode and Step mode
|
|
X-Y velocity
|
0~400mm/s adjustable
|
Scanning path
|
Arbitrary path definition
|
|
X-Y resolution(minimum movement)
|
0.1μm
|
Control
|
Working mode
|
Automatic repair, automatic data
|
|
Z velocity
|
0~2mm/s Adjustable
|
load, on-line communication
|
|
Z resolution (minimum movement)
|
0.1μm
|
Manual or automatic repair
|
|
Repeatability accuracy
|
+-5μm
|
Panel load
|
Robot
|
|
Repair alignment accuracy
|
0.1μm
|
CIM system
|
Yes
|
|
Microscope
|
magnification
|
50X~ 1000X
|
Anti-vibration
|
Vibration free table installed
|
|
Industry PC
|
23-inch display & computer: i7
|
|
objectives
|
5X,10X, 20X, 50X NIR, 50X
|
processor, 2 blocks 1TB hard disk
|
|
UV, 50X NUV Objects
|
(one of which is a backup hard disk),
|
|
Optical resolution
|
0.7μm
|
8G memory, 1G Independent video
|
|
card, DVD-ROM
|
|
Objective switching speed
|
0.2~0.7s
|
Communication interface
|
RS232 / EtherCAT / GPIB etc.
|
|
Security
|
Frame covered , and the operator
|
|
Switching lens deviation
|
Less than 3μm
|
operates outside .EMO
|
|
Focus
|
Laser auto focus
|
Limit sensor, Motion platform and
Laser system limit interlock
|
|
Cemera
|
2 million pixels
|
Alarm
|
|
Lighting
|
TOP/Bottom coaxial LED light,Light adjustable independently
|
|
Direction of application
|
TFT-LCD and OLED array panel short circuit and open circuit repair, Mask defects repair
|
|
Characteristic
|
|
Stable laser repair results
|
Feature-rich software
|
|
Ultrafast laser repair speed
|
Repair shape can be edited arbitrary
|
|
Linear Motor platform with 0.1μm Resolution
|
Automatic AOI defect location
|
|
Minimal damage
|
Multistation desgin
|
|
Laser precision 1μm
|
Automatic panel exchange
|
