Our website uses cookies provided by us and third parties. Some cookies are necessary for the operation of the website, and you can adjust other cookies at any time, especially those that help us understand the performance of the website, provide you。

I accept
Phone Number*
Company Name:
Product Overview Functional structure Specifications Download
E Series 150mm Economical Manual Probe Station

Product Overview

E series prober has excellent mechanical system, stable structure and performance, ergonomic design, more convenient operation, support multi-function upgrade, more abundant product functions. The product is mainly used in the manufacturing and research fields of integrated circuit,LED,LCD, solar cell and other industries.

Basic Information

Product number E6 working environment Open type
electricity demand 220V,50~60Hz Control method Manual Probe Station
Product Size 640mm long *700mm wide *730mm highr equipment weight About 80 kg

Application direction

LD/LED/PD Light intensity/wavelength test electrode /PAD test PCB/ package device Test material/device IV/CV characteristic test device high-frequency characteristic test (up to 300GHZ frequency) rf test, etc.

Technical characteristics

> POMater™ Adaptive shock absorbing base

The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.

>The chuck can be adjusted lifting

The chuck can be adjusted lifting, the stroke is 5mm, and the accuracy is 10μm, which is convenient for the sample to quickly separate the probe.

>Pneumatic fast lifting of microscope

The microscope is pneumatically quickly lifted, which is convenient to replace the microscope and the probe card holder.

>Large size platform design

Large-size body structure enhances operating comfort. The micropositioner platform with larger space supports the loading of probe cards and improves the efficiency of probing test.


E series
Model E4 E6 E8 E12
L: 580mm*
W: 620mm*
H: 730mm
L: 640mm*
W: 700mm*
H: 730mm
L: 660mm*
W: 660mm*
H: 700mm
L: 1030mm*
W: 820mm*
H: 730mm
Weight (about) 70KG 80KG 85KG 180KG
Electricity Demand 220VC, 50~60Hz
Chuck Size & Rotation angle 4", 360° Rotation 6", 360° Rotation 8", 360° Rotation 12", 360° Rotation
X-Y  Travel Range 4" * 4" 6" * 6" 8" * 8" 12" * 12"
Z Travel Range 6mm (Fast switching) / 6mm (Fine-tune)
Moving Resolution 10μm
Sample fixed mode Vacuum adsorption
Electrical design Electrical Floating with Banana plug adapter, can be used as a backside electrode
Platen U Shape 6 micropositioners available 8 micropositioners available 10 micropositioners avaible 12 micropositioners available
Microscope Moving range X-Y : 2" * 2",  Z : 50.8mm
Moving Resolution 1μm
Switching lens mode Microscope Manually Tilting 30°by Lever
Magnification 16~100X/20~4000X
Lens specification Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 100XOption
CCD Pixel 50W (Analog) / 200W (Digital) / 500W (Digital)
Micropositioner X-Y-Z Moving range 12mm-12mm-12mm / 8mm-8mm-8mm
Mechanical resolution 10μm / 2μm / 0.7μm / 0.1μm
Current leakage accuracy Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,
Test conditions: dry environment with ground shielding (air dew point below -40°C)
Cable connectors Banana head  / Crocodile clip /  Coaxial / Triaxial
Application IC/LD/LED/PD test, PCB / Packaged device test, RF test etc.
Optional Accessories Microscope tilt mechanism (Tilting 30°Manually by Lever) Gold-plated chuck
Microscope pneumatic lifting mechanism Coaxial / Triaxial chuck
Laser cutting and repairing Chuck quick pull-out mechanism
Probe clamp Chuck rotation fine adjustment

Dark field of microscope / DIC / Normarski test, Light intensity

/ wavelength test interface accessory

Light intensity / wavelength selection
Liquid crystal leakage analysis package RF Testing accessoriess
High voltage and high current measurement package Active probe
Hot chuck Low current / Capacitance test
High/Low temprature chuck intergration of intergral sphere
Shielding box Fixture for Fibre optic coupler test
Special adapter Fixture of PCB / Package test options
Vibration free table Special Custom design
Charancteristic 1. Gantry design of the Microscope
2. The Microscope can be tilted or pneumatic lifted to change objective lens easily
3. Can be upgraded to do RF, high current testing and laser repair applications.
4. high moving accuracy
Compact design, affordable price Driver Screws: Zero back lash
Compatible with high magnification metallographic microscope, and can fine tune the movement Available for 1um electrode / PAD probe
University / Institute / Company laboratory use LD/LED/PD Light intensity / wavelength testing
Up to 12 inch wafer testing IV/CV Characteristic testing of materials / devices
Precision  lead screw drive structure, linear movement

High frequency characteristic test of devices

(up to 300GHz)

Customer Service
Request for quotation Request for quotation
Contact number

Contact number

0755-2690 6952 turn 801/804/806/814

Send Email Send Email
© 2023 SEMISHARE CO., LTD. All Rights Reserved.粤ICP备19119103号