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Test Solution

Semi-Automatic Probe Station Measurement Technology

Semi-Automatic Probe Station Measurement Technology
Technical Background

With the rapid development of China's semiconductor technology, multiple 12-inch wafer plant and the establishment of laboratories, gradually appeared to 12-inch wafer testing Probe needs to improve, now 12-inch wafer Prober mostly depends on import equipment , and presents the status of the demand greater than supply, so the domestic is an urgent need to research and development of China's autonomous 12-inch wafer testing equipment, to solve the dilemma in the only rely on foreign imports.

Face the Challenge

The existing semiconductor chip test probe stations in China are prone to shake after a long time of work. During the operation of the probe, the probe station is unstable and prone to test errors, which brings inconvenience to users.

Technical Summary

Technology Name: A semi-automatic wafer probe bench Test measurement technology (ThreeInoneTM technology)

Patent Type: Invention Technology Patent

Patent Number: 201910551072.8

ThreeInoneTM technology provides a probe bench with high stability and semi-automatic wafer testing equipment. Through the stable structure of low center of gravity, the problem that the equipment is easy to shake and affect the test accuracy in wafer testing is solved, and the high stability performance of probe bench is guaranteed finally, so that the test can reach the high precision.

The equipment is also equipped with the industry leading ThreeZoomTM microscope. For compatibility with 6 inch, 8 inch and 12 inch wafers, the imaging effect of ThreeZoomTM can be observed in the image without lens and multiplier switching. Meanwhile, the rendering of ThreeZoomTM can satisfy the wafer and most samples in the laboratory, with high compatibility, and also improve the efficiency of each test.

Application Cases

  • Nanyang Technological University
  • SEMISHARE X8  Semi-Automatic Probe Station

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