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    Product Overview Functional structure Specifications Download
    Mask Cut Repair L14

    Product Overview

    The L14 series mask laser cutting and repair equipment is mainly used to repair defects that occur during the use of photomasks. At the core of the device is SEMISHARE's advanced machine vision system, which provides a high-precision, cost-effective repair solution for high-value photomask defects that helps companies lower production and operational costs.

    Basic Information

    Product number L14 working environment Open Type
    electricity demand AC 220V ±5% 50Hz Control method Manual
    Product Size Customizable equipment weight Customizable

    Application direction

    Application scenarios that require precise cutting or removal of specific material layers.

    Technical characteristics

    Mask Cut Repair L14

    ●It can handle the repair of various materials including chromium, silicon, silicon nitride, quartz, EUV materials, foreign particles and stubborn unknown particles.
    ●It can precisely remove or repair defective areas without affecting other parts of the mask.
    ●It can provide customized products according to customer needs.

    Title

    Stage

    Size

    500mm*320mm

    X-Y Travel

    8*8 inches

    Sample Fixing Method

    natural placement

    Light Source

    backlight, upper light source

    Microscope Characteristics

    Travel

    mirror body fixed, Z-axis travel: 50mm

    CCD Pixel

    50W(analog)/200W(digital)/500W(digital)

    Eyepiece

    10X eyepiece

    Objective Lens

    5X, 10X, 20X, 50X (optional), 100X (optional)

    Objective Lens Turntable

    manual nose wheel

    Laser Characteristics

    Wavelength

    optional wavelength: 1064/532/355/266nm band

    Energy

    output power: 2.2mJ/pulse

    Micromachining Capability

    machinable materials: Cr/Al/ITO/Ni/TFT/RGB/Poly Silicon/Mo/SiN/mpurities in CF, etc.

    Processing Accuracy

    minimum process accuracy 1*1μm (when equipped with 100X lens)

    Cooling Method

    air-cooled laser/water-cooled laser


    Customer Service
    Request for quotation Request for quotation
    Contact number

    Contact number

    0755-2690 6952 turn 801/804/806/814

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