Product Overview
The L14 series mask laser cutting and repair equipment is mainly used to repair defects that occur during the use of photomasks. At the core of the device is SEMISHARE's advanced machine vision system, which provides a high-precision, cost-effective repair solution for high-value photomask defects that helps companies lower production and operational costs.
Basic Information
Product number | L14 | working environment | Open Type |
electricity demand | AC 220V ±5% 50Hz | Control method | Manual |
Product Size | Customizable | equipment weight | Customizable |
Application direction
Application scenarios that require precise cutting or removal of specific material layers.
Technical characteristics
Mask Cut Repair L14
●It can handle the repair of various materials including chromium, silicon, silicon nitride, quartz, EUV materials, foreign particles and stubborn unknown particles.
●It can precisely remove or repair defective areas without affecting other parts of the mask.
●It can provide customized products according to customer needs.