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Advanced Manual Probers Solutions - SEMISHARE Prober

Embark on a journey of semiconductor testing finesse with our manual prober collection. Dive into SEMISHARE Prober's unique manual prober solutions for precision.

SEMISHARE: Pioneering Manual Prober Technology in Semiconductor Testing

In the intricate world of semiconductor testing, precision and reliability are paramount. SEMISHARE's H Series Integrated Manual Probe Station stands at the forefront of manual prober technology, offering unparalleled performance for a wide range of semiconductor testing applications. This article delves into the nuances of manual probers, their critical role in semiconductor development, and the innovative features that set SEMISHARE's technology apart.

Understanding the Manual Prober

A manual prober, the cornerstone of semiconductor testing in many research and development settings, is a sophisticated device designed for hands-on electrical testing of semiconductor wafers and chips. Unlike automated systems, a manual prober allows for direct user control, making it invaluable for detailed analysis and specialized testing scenarios.

Key Components of a Manual Prober:

1. Probe Platen: The platform where probe positioners are mounted.

2. Chuck: A specialized stage that holds the wafer or device under test.

3. Microscope: For visual inspection and precise probe placement.

4. Probe Positioners: Mechanical arms for precise probe movement.

5. Vibration Isolation System: To minimize external disturbances.

SEMISHARE's H Series manual prober integrates these components with advanced technologies, creating a system that excels in precision, stability, and user-friendliness.

The Evolution of Manual Prober Technology

Manual probers have come a long way since their inception. Early models were basic mechanical devices with limited precision. Today's manual probers, like SEMISHARE's H Series, incorporate advanced materials, precision engineering, and sophisticated control systems.

Key advancements in manual prober technology include:

1. Improved Positioning Accuracy: From millimeter to sub-micron precision.

2. Enhanced Vibration Isolation: Using active and passive damping systems.

3. Integration of Digital Imaging: For real-time visual feedback.

4. Advanced Chuck Technologies: Including thermal control and air-bearing systems.

5. Software Integration: For data collection, analysis, and process automation.

SEMISHARE's Innovations in Manual Prober Design

Chuck Air Bearing Move Technology

This groundbreaking feature in SEMISHARE's manual prober revolutionizes wafer handling:

1. Frictionless Movement: Allows for smooth, precise wafer positioning.

2. Reduced Contamination: Minimizes particle generation during movement.

3. Enhanced Throughput: Enables faster repositioning between test points.

4. Improved Accuracy: Eliminates stick-slip effects common in mechanical systems.

The air bearing system uses a thin film of pressurized air to float the chuck, reducing friction to near-zero levels. This not only improves positioning accuracy but also extends the life of the chuck mechanism.

Large Handle Differential Head Drive

This ergonomic innovation significantly enhances user experience and precision:

1. Intuitive Control: Large handles provide better tactile feedback.

2. Fine Adjustment: Differential mechanism allows for micrometer-level adjustments.

3. Reduced Operator Fatigue: Ergonomic design for extended use.

4. Increased Stability: Minimizes unintended movements during adjustment.

The differential head drive combines coarse and fine adjustment capabilities, allowing operators to make precise movements with ease. This is particularly crucial when working with dense semiconductor layouts.

Microscope Air-Controlled Lifting Control

This feature enhances both functionality and safety:

1. Smooth Vertical Movement: Precision air control for focus adjustments.

2. Collision Prevention: Automated safeguards to prevent accidental contact.

3. Extended Working Distance: Facilitates easier wafer and probe manipulation.

4. Rapid Objective Changes: Streamlines workflow for different magnification needs.

The air-controlled system provides a level of control and safety not possible with manual lifting mechanisms, ensuring the delicate balance between close observation and wafer protection.

Three-Stage Lifting Needle Base Platform

This advanced system offers unparalleled flexibility in probe positioning:

1. Rapid Height Adjustment: Quick transitions between test, separation, and loading positions.

2. Micrometer-Level Precision: Fine control for exact probe placement.

3. Consistent Repeatability: Ensures reliable results across multiple tests.

4. Enhanced Safety Features: Incorporates locks to prevent accidental movements.

The three-stage system allows for both rapid gross adjustments and ultra-fine positioning, catering to a wide range of testing scenarios.

Applications of Manual Probers in Modern Semiconductor Testing

Manual probers find applications across various sectors of the semiconductor industry:

1. Research and Development

- New Material Characterization: Testing electrical properties of novel semiconductor materials.

- Device Prototyping: Evaluating performance of experimental chip designs.

- Failure Analysis: Identifying and analyzing defects in semiconductor devices.

2. Low-Volume Production

- Custom IC Testing: For specialized or small-batch integrated circuits.

- MEMS Device Evaluation: Testing micro-electromechanical systems.

- Photonic Device Characterization: Analyzing optoelectronic components.

3. Educational Institutions

- Hands-on Training: Teaching semiconductor testing principles to students.

- Academic Research: Supporting cutting-edge studies in microelectronics.

4. Quality Control

- Spot-Checking: Verifying the quality of production batches.

- Process Validation: Ensuring manufacturing processes meet specifications.

5. Specialized Testing Environments

- High/Low Temperature Testing: Evaluating device performance under extreme conditions.

- High-Frequency Testing: Characterizing RF and microwave devices.

- High-Power Device Testing: Assessing performance of power semiconductors.

SEMISHARE's manual prober excels in these applications, offering the flexibility and precision needed for diverse testing requirements.

The Role of Software in Manual Prober Operations

While the physical components of a manual prober are crucial, the software interface plays an equally important role:

1. Test Pattern Generation: Creating custom test sequences for specific devices.

2. Data Acquisition and Analysis: Collecting and processing test results in real-time.

3. Probe Positioning Control: Assisting in precise probe placement and movement.

4. Environmental Monitoring: Tracking and controlling test conditions.

5. Integration with External Instruments: Coordinating with other test equipment.

SEMISHARE's prober software is designed for intuitive operation while offering advanced capabilities for data management and analysis.

As semiconductor technology continues to advance, manual probers are evolving to meet new challenges:

1. Increased Automation: Integration of automated features for repetitive tasks.

2. Enhanced Resolution: Pushing the boundaries of probe positioning accuracy.

3. Advanced Materials: Incorporating new materials for improved performance and durability.

4. IoT Integration: Connecting probers to the broader manufacturing ecosystem.

5. AI-Assisted Testing: Implementing machine learning for test optimization and fault detection.

SEMISHARE is at the forefront of these developments, continuously refining its manual prober technology to meet the evolving needs of the semiconductor industry.

In the rapidly evolving field of semiconductor technology, the role of precise and reliable testing equipment is more critical than ever. SEMISHARE's H Series Integrated Manual Probe Station represents the pinnacle of manual prober technology, offering unparalleled precision, versatility, and user-friendliness.

From its innovative Chuck Air Bearing Move Technology to its ergonomic Large Handle Differential Head Drive, every aspect of SEMISHARE's manual prober is designed to enhance the testing process. Whether used in cutting-edge research laboratories, educational institutions, or specialized production environments, this manual prober provides the tools necessary to push the boundaries of semiconductor technology.

As the semiconductor industry continues to advance, with devices becoming smaller, more complex, and more powerful, the need for sophisticated testing equipment grows. SEMISHARE's commitment to innovation ensures that its manual prober technology evolves in tandem with these industry developments, providing researchers and engineers with the tools they need to shape the future of electronics.

For those seeking to elevate their semiconductor testing capabilities, SEMISHARE's manual prober offers a compelling solution. Its combination of precision, flexibility, and advanced features makes it an indispensable tool in the quest for semiconductor innovation and quality assurance.

To learn more about how SEMISHARE's manual prober can enhance your semiconductor testing processes, visit our website at https://www.semishareprober.com/. Discover the difference that precision, reliability, and innovation can make in your semiconductor testing endeavors.

 
Product Overview Functional structure Specifications Download Video
H Series Integrated Manual Probe Station

Product Overview

H series is a high-end comprehensive manual test probe configuration, the device has excellent stability and maneuverability, and the test precision are higher than that of the rest of the industry brand, unique pneumatic chuck mobile technology flexible UPStart modular structure design enhance sexual shockproof system, these are all SEMISHARE advanced innovation technology advantage in the industryAt the same time, the equipment can support late expansion and upgrading, to meet the needs of customers for a variety of test applications. No matter now or in the future, when customers' test needs increase or change, the equipment can be reconfigured and upgraded to truly realize multiple applications with one machine. The equipment is very suitable for the one-step budget acquisition and investment of r&d centers and laboratories in universities.

Basic Information

Product number H6/H8/H12 working environment Open type
electricity demand 220V,50~60Hz Control method Manual Probe Station
Product Size 1300MM long *920MM wide *920MM high equipment weight About 300 kg

Application direction

It is suitable for scientific research and analysis of nano micro devices, spot check and detection, etc., to quickly analyze and test the circuit of the chip on the wafer and judge the product performance by the electrical parameters, and then reduce the loss of the chip defects to the product, so as to improve the yield and carry the rf characteristic test and upgrade and carry the optical fiber spectrum characteristic test.

Technical characteristics

>Chuck Air bearing move technology

Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving: one hand control X/Y direction fast moving, hands control samples total plane fast moving traditional ball/bearing type samples can only achieve X/Y axis one-way movement, and movement speed slower;Although the ordinary air-floating sample table can realize full plane rapid movement of the sample table, it cannot realize one-way accurate movement positioning of the X/Y axis, which can meet the needs of production measurement. The 3-weight air-controlled sample table perfectly combines and realizes the above two functions.

>Large handle differential head drive

Chuck the mobile platform is equipped with coarse and fine adjustment function, fine adjustment knob driven by the industry's top Japan Mitutoyo big handle differential head, small compared with the traditional differential head adjustment, feel more comfortable to adjust operation more smoothly and no return bad, really realize super smooth efficient test manually, improve test efficiency, saving the cost of customer tests.

>Microscope air - controlled lifting control

The microscope can rise and fall 50mm by means of air control. The microscope can rise and fall smoothly by means of high quality valve control and fine adjustment of high pressure air inlet and outlet throttling, so as to facilitate the replacement of objective lens and better protect against accidental contact damage between objective lens and fixture in the test.

> Three - stage lifting needle base platform

The needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5um). All parts of Platen can rise and fall at the same time (there is no different phenomenon). After rising and falling, the repeatability of the probe in x, Y and Z directions of needle marks on the pad is better than that of othersThe 1um, repeatable (1 m) needle base platform has three discrete positions for contact, separation (300 m) and loading (3mm) and is equipped with a safety lock to prevent accidental damage to the probe or wafer while providing intuitive control and accurate contact positioning for the most accurate measurement. This function is important in high frequency and high power testing.

> Loadable laser

Multiband laser cutting system can be applied to a load in the vast majority of microscope on the analysis of the failure, can realize precise cutting and selective onlookers level material removal precision and reliable advanced laser transmission system (ABDS) can choose different band to deal with different material cutting and cutting work laser output energy of 2.7 mJ, largest energy adjustable series 300 water cycle cooling structure make the system more compact and dispensing with maintenance.

Title

H series
Specification
Model H6 H8 H12
Dimension L: 820mm*
W: 720mm*
H: 890mm
L: 960mm*
W: 850mm*
H: 900mm
L: 1300mm*
W: 920mm*
H: 920mm
Weight (about) 170KG 230KG 300KG
Electricity Demand 220VC, 50~60Hz
Chuck Size & Rotation angle 6", 360° Rotation 8", 360° Rotation 12", 360° Rotation
X-Y Travel range 6" * 6" 8" * 8" 12" * 12"
Moving resolution 1μm
Sample fixed mode Vacuum adsorption
Electrical design Electrical Floating with Banana plug adapter, can be used as a backside electrode
Platen U shape platen 6 micropositioners available 8 micropositioners available 12 micropositioners available
Move range & adjustment mode Platen can be quickly lifted up and down 6mm for fast probe tip seperation
Platen can be fine tuned up and down 25mm precisely with 1μm resolution
Microscope Travel range X-Y axis : 2" * 2",  Z axis : 50.8mm
Moving resolution 1μm
Switching object lens Microscope tilting 30°manually by Lever
Magnification 20~4000X
Lens specification Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 100Xoption
CCD pixels 50W (Analog) / 200W (Digital) / 500W (Digital)
Micropositioner specification X-Y-Z Travel range 12mm-12mm-12mm / 8mm-8mm-8mm
Mechanical resolution 10μm / 2μm / 0.7μm / 0.1μm
Current leakage accuracy
Coaxial 1pA/V @ 25 ℃; Three shaft 100fA/V @ 25 ℃; Triaxial 10pA@3kv @25°C,Test conditions: dry environment for grounding shield (air dew point lower than - 40 ° C)
Cable connectors Banana head / Crocodile clip /  Coaxial / Triaxial
Application

Wafer test, Photoelectric device test, PCB / IC test, RF test,  high voltage and high

current measurement etc.

Optional Accessories Chuck quick roll out mechanism
Microscope tilt mechanism (Tilting 30° manually by Lever )
Microscope pneumatic lifting mechanism
Laser repair with cutting,ablation and welding function
Probe clamp
Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test
IC hotspot detection by LC
High voltage and high current measurement
Hot chuck
High/Low temprature chuck
Shielding box
Special adapter
Vibration free table
Gold-plated chuck
Coaxial / Triaxial chuck
Chuck quick move-out and fine adjustment mechanism
Chuck rotation fine adjustment
Light intensity / wavelength testing
RF Testing
Active probe
Low current / Capacitance test
Intergartion of intergral sphere
Fixture for Fibre optic coupler test
Fixture of Package IC test
Fixture of PCB test
Special Custom design
Characteristics
Stable structure, Platen can be quick lifted and fine-tuned, Suitable
for probe card installation and usage
Comfortable large handle, Driver Screws: Zero back lash
Compatible with high magnification metallographic microscope Internal circuit/ electrode/ PAD probe
Suitable in University and Research laboratory LD/LED/PD Light intensity / wavelength testing
Up to 12 inch wafer testing IV/CV Characteristic testing of materials / devices
High precision lead screw drive structure, linear movement

High frequency characteristic test of devices

(up to 300GHz frequency)



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Contact number

0755-2690 6952 turn 801/804/806/814

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