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Probe Station
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Product Overview Functional structure Specifications Download Video
M Series Basics Manual Probe Station

Product Overview

A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.

Basic Information

Product number M4、M6、M8 working environment Open type
electricity demand 220V,50~60Hz Control method Manual probe station
Product Size M4、M6:650*490*620mm M8:766*500*651mm equipment weight M4:about 45kg M6:about 52kg M8:about 90kg

Application direction

This equipment is mainly used for testing in semiconductor and optoelectronic industries, including r&d chip and LD/LED/PD test of complex high-speed devices,PCB/ package device test, AND IV/CV characteristic test of electrode /PAD test material/device over 50 microns.

Technical characteristics

> New upgraded chuck mobile platform

Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.

> Chuck with 3-stage vacuum adsorption control

The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.

> POMater™ Adaptive shock absorbing base

The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.


Title

Model

M4

M6

M8

Size(L*W*H)

650*490*620mm

766*500*651mm

Weight(KG)

About 45kg

About 52kg

About 90kg

Electricity demand

220VC,50~60Hz

Chuck

Room temperature standard

Chuck size

4"

6"

8"

Sample fixation method

Ring vacuum adsorption (porous adsorption can be customized)

Back electrode test function

Yes/sample stage is electrically independent

Chuck material

316#Stainless Steel/Optional Copper Nickel Plated or Gold Plated

Chuck

mobile platform

X-Y travel

100*100mm

150*150mm

200*200mm

Movement accuracy

10μm

Theta itinerary

±45°rotation (coarse adjustment); fine adjustment range ±8°, fine adjustment accuracy 0.01°

Chuck lifting

N/A

Chuck quick pull out

N/A

Control method

small knob drive

Micropositioner

SizeL*W)

540mm*310mm

Chuck to platform distance

8mm (the upper surface of the chuck and the lower surface of the micropositioner)

Number

Up to 6 pins can be placed (DC×6/RF×4,DC×2)

Micropositioner lift

N/A

Micropositioner fixing

Magnetic adsorption or vacuum adsorption

Optical properties

Microscope Specifications

Standard stereo microscope (optional video microscope)

Gain

16~100X

CCD pixel

2 kinds of CCD optional: 200W (digital)/800W (digital)

Microscope control stroke

Microscope focus frame control can be rotated 360 degrees,

Z axis: 50.8mm

Microscope movement accuracy

N/A

Lens switching method

N/A

Probe Specifications

X-Y-Z travel

12mm-12mm-12mm

Mechanical precision

10μm/2μm/0.7μm

Leakage accuracy

Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,Test conditions: grounded shielded dry environment (air dew point below -40°C)

Interface form

Banana head/Alligator clip/Coaxial/Triaxial interface

Customer Service
Request for quotation Request for quotation
Contact number

Contact number

0755-2690 6952 turn 801/804/806/814

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