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    Probe Station System
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    Product Overview Functional structure Specifications Download Video
    M Series Basics Manual Probe Station

    Product Overview

    A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.

    Basic Information

    Product number M4、M6、M8 working environment Open type
    electricity demand 220V,50~60Hz Control method Manual probe station
    Product Size M4、M6:650*490*620mm M8:766*500*651mm equipment weight M4:about 45kg M6:about 52kg M8:about 90kg

    Application direction

    This equipment is mainly used for testing in semiconductor and optoelectronic industries, including r&d chip and LD/LED/PD test of complex high-speed devices,PCB/ package device test, AND IV/CV characteristic test of electrode /PAD test material/device over 50 microns.

    Technical characteristics

    > New upgraded chuck mobile platform

    Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.

    > Chuck with 3-stage vacuum adsorption control

    The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.

    > POMater™ Adaptive shock absorbing base

    The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.


    Title

    Model

    M4

    M6

    M8

    Size(L*W*H)

    650*490*620mm

    766*500*651mm

    Weight(KG)

    About 45kg

    About 52kg

    About 90kg

    Electricity demand

    220VC,50~60Hz

    Chuck

    Room temperature standard

    Chuck size

    4"

    6"

    8"

    Sample fixation method

    Ring vacuum adsorption (porous adsorption can be customized)

    Back electrode test function

    Yes/sample stage is electrically independent

    Chuck material

    316#Stainless Steel/Optional Copper Nickel Plated or Gold Plated

    Chuck

    mobile platform

    X-Y travel

    100*100mm

    150*150mm

    200*200mm

    Movement accuracy

    10μm

    Theta itinerary

    ±45°rotation (coarse adjustment); fine adjustment range ±8°, fine adjustment accuracy 0.01°

    Chuck lifting

    N/A

    Chuck quick pull out

    N/A

    Control method

    small knob drive

    Micropositioner

    SizeL*W)

    540mm*310mm

    Chuck to platform distance

    8mm (the upper surface of the chuck and the lower surface of the micropositioner)

    Number

    Up to 6 pins can be placed (DC×6/RF×4,DC×2)

    Micropositioner lift

    N/A

    Micropositioner fixing

    Magnetic adsorption or vacuum adsorption

    Optical properties

    Microscope Specifications

    Standard stereo microscope (optional video microscope)

    Gain

    16~100X

    CCD pixel

    2 kinds of CCD optional: 200W (digital)/800W (digital)

    Microscope control stroke

    Microscope focus frame control can be rotated 360 degrees,

    Z axis: 50.8mm

    Microscope movement accuracy

    N/A

    Lens switching method

    N/A

    Probe Specifications

    X-Y-Z travel

    12mm-12mm-12mm

    Mechanical precision

    10μm/2μm/0.7μm

    Leakage accuracy

    Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,Test conditions: grounded shielded dry environment (air dew point below -40°C)

    Interface form

    Banana head/Alligator clip/Coaxial/Triaxial interface

    Customer Service
    Request for quotation Request for quotation
    Contact number

    Contact number

    0755-2690 6952 turn 801/804/806/814

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