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Product Overview Functional structure Specifications Download Video
M Series Basics Manual Probe Station

Product Overview

A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.

Basic Information

Product number M4/M6/M6 mini working environment Open type
electricity demand 220V,50~60Hz Control method Manual probe station
Product Size 400mm *400mm *550mm (L*W*H) equipment weight About 30 kg

Application direction

This equipment is mainly used for testing in semiconductor and optoelectronic industries, including r&d chip and LD/LED/PD test of complex high-speed devices,PCB/ package device test, AND IV/CV characteristic test of electrode /PAD test material/device over 50 microns.

Technical characteristics

> New upgraded chuck mobile platform

Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.

> Chuck with 3-stage vacuum adsorption control

The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.

> POMater™ Adaptive shock absorbing base

The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.


M series




M-6 mini



L :  400mm*
W : 400mm*
H :  550mm


L : 680mm*
W : 530mm*
H : 550mm

Weight (about)




Electricity Demand

220VC, 50~60Hz


Size & Rotation angle

4", 360° Rotation

6", 360° Rotation

6", 360° Rotation

X-Y Moving range

4" * 4"

4" * 4"

6" * 6"

Moving resolution


Sample fixed mode

Vacuum adsorption

Electrical design

Electrical Floating with Banana plug adapter, can be used as a backside electrode


U Shape

6 Micropositioners available

8 Micropositioners available


Moving range

360° Rotation Z : 50.8 mm


16~100X  (200X as a option)

CCD Pixel

50W (Analog) / 200W (Digital) / 500W (Digital)


X-Y-Z Moving range


Mechanical resolution

10μm / 2μm / 0.7μm

Current leakage accuracy

Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,
Test conditions: dry environment with ground shielding (air dew point below -40°C)

Cable connectors

Banana head / Crocodile clip /  Coaxial / Triaxial

Optional Accessories

Hot chuck

Light intensity / wavelength testing

Shielding box

RF Testing accessoriess

Special Adapter

Active probe

Vibration Free Table

Low current / Capacitance test

Gold-plated chuck

Intergration of intergral sphere

Coaxial / Triaxial chuck

Fixture for Fiber optic coupler test

Chuck quick Up/Down and fine

Fixture of PCB / IC test

adjustment option

Chuck rotation fine adjustment

Special Custom design


For IC/LD/LED/PD testPCB / Packaged device  test ,RF Test etc.


Compact design

procision lead screw drive structure, linear movement

Light weight

Driver Screws: Zero back lash

Affordable price

Available for 50um electrode / PAD probe

Popular in University and Research laboratory

LD/LED/PD Light intensity / wavelength testing

Up to 6 inch wafer test

IV/CV Characteristic testing of materials / devices

Customer Service
Request for quotation Request for quotation
Contact number

Contact number

0755-2690 6952 turn 801/804/806/814

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